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Photoresist Processing | Trouble-Shooting | Etchants and Solvents |  |
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| Strange Appearance (Color, Particles) of the Resist (Film)… | Bubbles in the Resist Film? | Development Rate too low | Dark Erosion too high | Lift-off does not work (well) | Inferior Resist Adhesion |
| After Coating? | After Exposure? | After Baking Steps following Exposure? | After Development | During/after Coating (e.g. Metallization)? | During/after Dry-Etching |