Photoresist Processing

Trouble-Shooting

Etchants and Solvents

Photoresists

Ancillaries

Storage/Handling/Ageing

Substrate Pre-Treatment and Coating

Baking Steps

Exposure

Development

Coating and Lift-off

Etching and Stripping

Photoresists

Ageing of Photoresist

Developer

The ageing of developers (=aqueous alkaline solutions) originates from CO2-absorption from air, decreasing the developer activity and the development rate. Therefore, we recommend a storage in well-closed original containments. In case of open developer baths over a period of several days, a N2-stream minimizes the CO2-absorption. Certain developers (e.g. AZ® 400K, AZ® 351B) contain chemical buffers which enable a constant development rate over a long time span as compared with simple NaOH/KOH solutions.

Overview: Developer (Metal Ion containing)

Overview: Developer (Metal Ion free)

MicroChemicals® - All you need for microstructuring with short lead times also in small sales volumes: Photoresists (positive, negative, image reversal, thin and thick resists, spray resists, protective coating ...) Ancillaries ( developers, thinner, adhesion promoter such as HMDS, remover) Etchants (acids and the ready-to-use etching mixtures aluminium etch, chromium etch, gold etch und silicon etch) Solvents (acetone, isopropyl alcohol, MEK ... in VLSI and ULSI quality)