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Photoresist Processing | Trouble-Shooting | Etchants and Solvents | ![]() |
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| Photoresists | Ancillaries | Storage/Handling/Ageing | Substrate Pre-Treatment and Coating | Baking Steps | Exposure | Development | Coating and Lift-off | Etching and Stripping |
| Developers (Metal Ion Containing) | Developers (Metal Ion Free) | Remover/Stripper | Adhesion Promoter/Thinner/Edge Bead Removal | Compatibilities |
| AZ® Developer is optimized for minimum Aluminium attack/erosion and is typically applied 1:1 diluted in DI H2O for high contrast, or undiluted for high throughput. The dark erosion of this developr is comparable high. AZ® 351B is based on buffered NaOH and is typically applied in 1:4 dilution. AZ® 400K is based on buffered KOH and is typically applied in 1:4 dilution. AZ® 303 is based on NaOH and KOH, and a special developer for the AZ® 111 xfs photoresist. |
MIC developers |
Photoresist Development |
Compatibilities (Resists and Developers) |
Development |
| MicroChemicals® - All you need for microstructuring with short lead times also in small sales volumes:Photoresists (positive, negative, image reversal, thin and
thick resists, spray resists, protective coating ...) Ancillaries ( developers, thinner, adhesion promoter such as HMDS, remover) Etchants (acids and the ready-to-use etching mixtures aluminium etch, chromium etch, gold etch und silicon etch) Solvents (acetone, isopropyl alcohol, MEK ... in VLSI and ULSI quality) |